| 摘要 |
PURPOSE: An apparatus for automatically exchanging a tool for manufacturing semiconductor is provided to improve workability by automatically replacing the tool without stopping equipment. CONSTITUTION: A tool loading unit(10) rotates a tool loaded by an operator. The tool loading unit unloads the tool to a next device. A tool transfer unit(20) receives the tool from the tool loading unit. The tool transfer unit fixes and moves the tool to a pickup position. A tool pickup unit(30) holds the tool fixed to the tool transfer unit. |
