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发明名称
摘要
申请公布号
JP5227594(B2)
申请公布日期
2013.07.03
申请号
JP20080003912
申请日期
2008.01.11
申请人
发明人
分类号
H01L21/20;G02F1/1368;G09F9/00;H01L21/336;H01L29/786
主分类号
H01L21/20
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代理人
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