| 发明名称 |
WINDOW UNIT, WINDOW DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM |
| 摘要 |
<p>A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.</p> |
| 申请公布号 |
EP2609459(A1) |
申请公布日期 |
2013.07.03 |
| 申请号 |
EP20110746325 |
申请日期 |
2011.07.05 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
KAMEDA, HIDENOBU;MORIYA, MASATO;WAKABAYASHI, OSAMU |
| 分类号 |
G02B7/00;H01S3/034;H01S3/04 |
主分类号 |
G02B7/00 |
| 代理机构 |
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代理人 |
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