Electrical connection unit which can be attached to a vacuum pump

摘要

The unit has a vacuum tight signal channel formed between an atmosphere side and a vacuum side of a connection unit. A printed circuit board (24) is arranged in an atmosphere side housing part (1) and connected with interlayer connection parts (16, 16', 17, 17') of a ceramic plate (3). Plug-in connectors (25, 26) are arranged on the printed circuit board and connected over the printed circuit board with the interlayer connection parts of the ceramic plate. The plug-in connectors are outsidely connected on the atmosphere side housing part on atmosphere side.