发明名称 THIN FILM DEPOSITION DEVICE
摘要 Disclosed are a shadow mask and a deposition device having the same. The deposition device includes a shadow mask that has a plurality of openings, a chamber that has the shadow mask therein, a deposition cell disposed on a lower portion of the chamber, in which the deposition cell contains deposition materials, and a blocking member interposed between an inner side of the chamber and an outer side of the shadow mask so as to prevent the deposition materials from passing through between the inner side of the chamber and the outer side of the shadow mask. Deposition materials sublimated from a deposition cell are prevented from passing through the shadow mask, except for the openings of the shadow mask, so that the inside of a chamber can be prevented from being contaminated, thereby improving workability of a thin film deposition device. Deposition materials attached to the inside of the chamber can be prevented from being separated from the chamber, so the deposition materials cannot serve as particles.
申请公布号 KR101281909(B1) 申请公布日期 2013.07.03
申请号 KR20060060122 申请日期 2006.06.30
申请人 发明人
分类号 H05B33/10 主分类号 H05B33/10
代理机构 代理人
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