发明名称 DEVICE AND METHOD FOR HEAT-TREATING A PLURALITY OF MULTI-LAYER BODIES
摘要 <p>A device for continuous heat-treating of at least two multilayer bodies on at least two process levels disposed one beneath another in at least one heating chamber and at least one cooling chamber, which are arranged one after another is described. The heating chamber of the device has a first process level and a second process level. The cooling chamber of the device has a cooling device, the first process level and the second process level.</p>
申请公布号 EP2609617(A1) 申请公布日期 2013.07.03
申请号 EP20110767388 申请日期 2011.08.25
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 FUERFANGER, MARTIN;JOST, STEFAN
分类号 H01L21/00;H01L21/67;H01L21/677 主分类号 H01L21/00
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