| 摘要 |
<p>[Objective] When performance of an adsorption rotor falls, or even if an adsorption rotor surface layer gets clogged, the present invention provides an adsorption rotor which can be detached and replaced only of its surface layer. [The means of solution] The metal aggregate is extended in the width direction of the rotor element so that the metal aggregate can fix the attachment-and-detachment adsorption rotor elements 6 by piling them up using bolts with the perimeter griddle fixing bracket 7, thus resulting in protecting the upper part of the integral-type adsorption rotor element. In this way, the weight of the attachment-and-detachment adsorption rotor elements 6 can be made light, resulting in them being fixable only using bolts, and thus of no necessity of using a special tool for the work, enabling unskilled personnels to easily carry out the detachment-and-replacement procedures. Moreover, because the detachment-and-replacement procedures can be performed from a rotor spindle side, thus from inside of a chamber, there is no necessity of using a heavy industrial machine etc., resulting in much reduction in the cost for the procedures.</p> |
