| 摘要 |
PURPOSE: The evaluation method of organic compound component of the raw materials is provided to prevent the corrosion of negligence by removing materials such as acid and alkali that are the main components of the raw material and concentrate or dry the diluted solution without additional contamination of organic compound component. CONSTITUTION: The analysis method of organic compound of the raw materials using GC-MS equipment comprises a step (S10) of manufacturing diluted solution including raw materials that is used for the analysis; a step (S30) of installing wafer that analyzes inside of the apparatus; a step (S40) of dropping the fixed quantity of diluted solution on the upper side of the wafer; and a step (S60) of performing the analysis with the GC-MS equipment. The step of manufacturing the diluted solution manufactures the concentration of the raw material within the range of 0.01-1.0% when organic solvent included to the diluted solution' is acid or alkali. [Reference numerals] (AA) Start; (BB) End; (S10) Step of manufacturing a distilled liquid; (S20) Step of heat-treating a wafer; (S30) Step of installing the wafer; (S40) Step of dropping the distilled liquid; (S50) Step of evaporating the distilled liquid; (S60) Step of analysis |
