发明名称 PROBE CARD AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A probe card and a manufacturing method thereof are provided to reduce manufacturing time and costs by omitting a process for planarizing a metal layer. CONSTITUTION: A bonding unit (40) includes at least one metal layer and a solder material layer. The metal layer is separated from one surface of a substrate (10). At least one probe pin is inserted into the groove part of the metal layer. The probe pin includes a bonding part, a body part (72), and a contact part. The body part is connected to one end of the contact part and supports the contact part.
申请公布号 KR20130072544(A) 申请公布日期 2013.07.02
申请号 KR20110140022 申请日期 2011.12.22
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 CHUNG, DOO YUN;LEE, DAE HYEONG;HONG, KI PYO;MA, WON CHUL;CHOI, YONG SEOK
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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