发明名称 |
Scanning probe microscope and method for detecting proximity of probes thereof |
摘要 |
A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.
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申请公布号 |
US8479308(B2) |
申请公布日期 |
2013.07.02 |
申请号 |
US201013380261 |
申请日期 |
2010.06.21 |
申请人 |
NISHIMURA KATSUHITO;KAWAKAMI YOICHI;FUNATO MITSURU;KANETA AKIO;HASHIMOTO TSUNEAKI;KYOTO UNIVERSITY |
发明人 |
NISHIMURA KATSUHITO;KAWAKAMI YOICHI;FUNATO MITSURU;KANETA AKIO;HASHIMOTO TSUNEAKI |
分类号 |
G01Q10/00 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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