发明名称 |
Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions |
摘要 |
A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
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申请公布号 |
US8475599(B2) |
申请公布日期 |
2013.07.02 |
申请号 |
US20060641362 |
申请日期 |
2006.12.18 |
申请人 |
FREER ERIK M.;DE LARIOS JOHN M.;RAVKIN MICHAEL;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRITZ C.;LAM RESEARCH CORPORATION |
发明人 |
FREER ERIK M.;DE LARIOS JOHN M.;RAVKIN MICHAEL;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRITZ C. |
分类号 |
B08B7/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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