发明名称 Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions
摘要 A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
申请公布号 US8475599(B2) 申请公布日期 2013.07.02
申请号 US20060641362 申请日期 2006.12.18
申请人 FREER ERIK M.;DE LARIOS JOHN M.;RAVKIN MICHAEL;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRITZ C.;LAM RESEARCH CORPORATION 发明人 FREER ERIK M.;DE LARIOS JOHN M.;RAVKIN MICHAEL;KOROLIK MIKHAIL;MIKHAYLICHENKO KATRINA;REDEKER FRITZ C.
分类号 B08B7/00 主分类号 B08B7/00
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