Apparatus and method for providing a temperature-controlled gas

摘要

A coolant delivery system and method for maintaining a temperature within a predetermined range of a set-point temperature in a vessel into which a coolant gas is discharged or a temperature of a material onto which the coolant gas is discharged. The coolant gas results from the mixing of a supply gas with a cryogen. Temperature regulation is provided by regulating the flow rate of a cryogen using a proportional valve, while providing an essentially constant flow rate of a supply gas.