| 摘要 |
PURPOSE: An epitaxial reactor and a lift pin thereof are provided to improve the operation yield of the epitaxial reactor by stably transferring a wafer in ascending and descending operations. CONSTITUTION: A body passes through a pin hole(31). A lift pin(1) raises a wafer. A holding unit is formed on the upper side of the body and is held in the pin hole. A moment erects the body. |
