| 摘要 |
PURPOSE: A contactless plate conveying apparatus is provided to maximize the straightness and quality of a flat plate with minimized the fraction defective of the flat plate. CONSTITUTION: A contactless plate conveying apparatus comprises a main plate(10) and nozzle members(20). Fluid supply paths for supplying high pressure fluid are formed inside the main plate. Nozzle grooves for guiding the flow of fluid are formed on the top of the main plate to generate the floating force of a flat plate while the fluid supplied from the fluid supply paths is sprayed. Discharge paths for vertically connecting the fluid supply paths and the nozzle grooves are formed. The nozzle members are installed in the discharge paths to be located on the top of the nozzle grooves of the main plate, and spray the fluid supplied along the fluid supply paths toward the nozzle grooves. |
