发明名称 Temporary wafer bonding method for semiconductor processing
摘要 A method for temporary wafer bonding employs an addition reaction curable adhesive composition. The adhesive composition may include (A) a polyorganosiloxane containing an average of at least two silicon-bonded unsaturated organic groups per molecule, (B) an organosilicon compound containing an average of at least two silicon-bonded hydrogen atoms per molecule in an amount sufficient to cure the composition, (C) a catalytic amount of a hydrosilylation catalyst, and (D) a solvent. The film prepared by curing the composition is removable with an etching solution.
申请公布号 KR101278460(B1) 申请公布日期 2013.07.02
申请号 KR20077019806 申请日期 2006.02.07
申请人 发明人
分类号 C09J183/04;H01L21/52 主分类号 C09J183/04
代理机构 代理人
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