| 摘要 |
PURPOSE: An apparatus for manufacturing a semiconductor is provided to manufacture a strong coating film by forming a coating layer on the surfaces of a robot blade, a shower head, a dummy wafer, a boat, an inner and outer tube. CONSTITUTION: A robot blade transfers a wafer. A shower head injects reaction gas to a chamber. A dummy wafer is used as a test wafer. A boat mounts the wafer. An inner and outer tube laminates semiconductor. [Reference numerals] (AA) Front side; (BB) Back side
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