发明名称 Semiconductor memory device and method for manufacturing the same
摘要 According to one embodiment, a semiconductor memory device includes a multilayer body, a second electrode film provided on the multilayer body, a second insulating film provided on the second electrode film, a semiconductor film, a memory film and a gate insulating film. At boundary between the inner surface of the second through hole and the inner surface of the third through hole, or on the inner surface of the second through hole, a step difference is formed so that an upper side from the step difference is thicker than a lower side from the step difference.
申请公布号 US8476766(B2) 申请公布日期 2013.07.02
申请号 US201113045819 申请日期 2011.03.11
申请人 TANAKA HIROYASU;ISHIDUKI MEGUMI;KATSUMATA RYOTA;KIDOH MASARU;KABUSHIKI KAISHA TOSHIBA 发明人 TANAKA HIROYASU;ISHIDUKI MEGUMI;KATSUMATA RYOTA;KIDOH MASARU
分类号 H01L23/48;H01L23/52 主分类号 H01L23/48
代理机构 代理人
主权项
地址