发明名称 |
Graphene grown substrate and electronic/photonic integrated circuits using same |
摘要 |
A graphene-on-oxide substrate according to the present invention includes: a substrate having a metal oxide layer formed on its surface; and, formed on the metal oxide layer, a graphene layer including at least one atomic layer of the graphene. The graphene layer is grown generally parallel to the surface of the metal oxide layer, and the inter-atomic-layer distance between the graphene atomic layer adjacent to the surface of the metal oxide layer and the surface atomic layer of the metal oxide layer is 0.34 nm or less. Preferably, the arithmetic mean surface roughness Ra of the metal oxide layer is 1 nm or less.
|
申请公布号 |
US8476739(B2) |
申请公布日期 |
2013.07.02 |
申请号 |
US20090624437 |
申请日期 |
2009.11.24 |
申请人 |
OKAI MAKOTO;HIROOKA MOTOYUKI;KYOTANI TAKASHI;ORIKASA HIRONORI;HITACHI, LTD. |
发明人 |
OKAI MAKOTO;HIROOKA MOTOYUKI;KYOTANI TAKASHI;ORIKASA HIRONORI |
分类号 |
H01L23/58 |
主分类号 |
H01L23/58 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|