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发明名称
Verfahren zum Ätzen der Oberfläche eines halbleitenden Körpers aus einem Tellurid eines zweiwertigen Metalles
摘要
申请公布号
CH339023(A)
申请公布日期
1959.06.15
申请号
CHD339023
申请日期
1955.11.29
申请人
N. V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
NOBEL,DIRK DE
分类号
C23F4/00;H01L21/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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