发明名称 IMPROVED SPECTRAL METROLOGY FOR HIGH REPETITION RATE GAS DISCHARGE LASER
摘要 A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth or the light emitted from the laser and a second output representative of a second parameter which is indicative or the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
申请公布号 KR101280917(B1) 申请公布日期 2013.07.02
申请号 KR20127016577 申请日期 2006.06.23
申请人 发明人
分类号 G01J3/28;G01J3/51 主分类号 G01J3/28
代理机构 代理人
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