| 摘要 |
This invention provides an approach and a device which can measure the direction and magnitude of the optical axis of an optical anisotropic membrane and thickness of the membrane with a high speed and a high precision, and furthermore capable of distribution measurement by 2-D light receiving elements. The P-polarized monochromatic light is made to irradiate from a plurality of incident directions with a specific angular intervals while centering the normal line (Z) provided on the measurement point (M), the S-polarized light in the reflected light is detected corresponding to the incident directions, among the incident directions showing minimal values in the intensity of the reflection light, the azimuth direction ([Phi]A) of the optical axis (OX) is determined based on the incident direction (v1) in which the minimal value (V1) held between the maximal values ([Lambda]1) and ([Lambda]2), and the polar angle direction ([theta]) is determined based on the incident direction in which the minimal value (V3) held between maximal ([Lambda]1) of maximum peak and its adjacent maximal ([Lambda]3) of medium peak is measured. |
