发明名称 |
APPARATUS FOR MANUFACTURING MULTI-LAYER MIRROR AND MULTI-LAYER MIRROR USING THE SAME |
摘要 |
PURPOSE: A manufacturing device for a multi-layer thin firm mirror and a grade mirror thereof are provided to narrow solid colors' full width at half maximum (FWHM) by making each thin film have a certain grade corresponding to the incidence angle of X-rays. CONSTITUTION: A multi-layer thin film mirror manufacturing device includes a substrate (10), a mask unit (20), an energy-generating unit (40), and a target (30). The substrate is fixed on a substrate supporting unit and target atoms are evaporated on the substrate. The mask unit is located at a certain interval from the substrate and a mask (25) through which the target atoms pass is formed. The target atoms are scattered by an energy source, which is radiated by the energy-generating unit. The mask unit is moved at a limited speed.
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申请公布号 |
KR20130071960(A) |
申请公布日期 |
2013.07.01 |
申请号 |
KR20110139468 |
申请日期 |
2011.12.21 |
申请人 |
JEONBUK TECHNOPARK |
发明人 |
RYU, CHEOL WOO;CHOI, BYOUNG JUNG;SON, HYUN HWA;KWON, YOUNG MAN;KIM, YOUNG JO;YOON, KWON HA |
分类号 |
H01J35/02 |
主分类号 |
H01J35/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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