METHOD AND APPARATUS FOR WAFER WET PROCESSING,申请号SG20130038807-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR WAFER WET PROCESSING
摘要	A gas dispenser in a process module for wet processing of wafer-shaped articles is substantially smaller than the article to be processed and is movable laterally of the article as it dispenses inert gas above the article.
申请公布号	SG190346(A1)	申请公布日期	2013.06.28
申请号	SG20130038807	申请日期	2011.11.16
申请人	LAM RESEARCH AG	发明人	KRAUS, HARALD;NARDONI, MARCO;BRUGGER, MICHAEL
分类号		主分类号
代理机构		代理人
主权项
地址

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