GYROMETRE A CAPACITES PARASITES REDUITES

摘要

The gyrometer (G1) has an inertial mass (2) suspended above a substrate. The mass is provided with an excitation part and a detection part (8). A displacing device displaces the excitation part in a direction along a plane of the mass. A capacitive detector detects movement of the detection part outside the plane of the mass. The detector has a suspended detection electrode (16) located facing towards the substrate so as to form a variable capacitor with the detection part. The electrode is placed above the detection part by a pillar (22) passing through the mass. Independent claims are also included for the following: (1) a rotation measurement system (2) a method for fabricating a gyrometer or measurement system.