发明名称 APPARATUSES FOR BONDING SEMICONDUCTOR CHIPS
摘要 An apparatus for bonding semiconductor chips may comprise transfer rails configured to transfer substrates, loading members configured to load the substrates onto the transfer rails, unloading members configured to unload the substrates from the transfer rails, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates. An apparatus for bonding semiconductor chips may comprise a transfer rail configured to transfer substrates, loading members configured to load the substrates onto the transfer rail, unloading members configured to unload the substrates from the transfer rail, a buffer member at a side of the transfer rail configured to temporarily receive the substrates loaded by the loading members, a first wafer supply unit configured to supply a first wafer including semiconductor chips, and/or a bonding unit configured to bond the semiconductor chips to the substrates.
申请公布号 US2013160952(A1) 申请公布日期 2013.06.27
申请号 US201213599548 申请日期 2012.08.30
申请人 HWANG YISUNG;LEE JUNGCHUL;KIM JAEHONG;CHUNG TAEGYEONG;SAMSUNG ELECTRONICS CO., LTD. 发明人 HWANG YISUNG;LEE JUNGCHUL;KIM JAEHONG;CHUNG TAEGYEONG
分类号 H01L21/46 主分类号 H01L21/46
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