发明名称 Operation of an electromagnetic radiation focusing element
摘要 A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
申请公布号 US2013163099(A1) 申请公布日期 2013.06.27
申请号 US201213694658 申请日期 2012.12.26
申请人 LIPHARDT MARTIN M. 发明人 LIPHARDT MARTIN M.
分类号 G02B3/00 主分类号 G02B3/00
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