| 摘要 |
PURPOSE: A fault detection device for an upper nozzle is provided to prevent defects such as oxidation in advance, and to reduce some unnecessary operations required for boring through a clogged upper nozzle. CONSTITUTION: A fault detection device(100) for an upper nozzle comprises a support part(110), an inert gas feed port, a permeability check unit(140), A sealing check unit(130), and a transition unit(160). The inert gas feed port supplies an inert to the upper nozzle. The permeability check unit checks permeability by measuring the flux speed of the inert gas flowing throughout the inner wall surface of the upper nozzle. The sealing check unit is provided to seal the upper nozzle and checks the state of a sealing by measuring the flux quantity of the inert gas flowing throughout the inner wall surface of the upper nozzle. The transition unit selectively changes and connects either the permeability check unit or the sealing check unit with the upper nozzle. The support part includes a turn table provided to rotate around a work plane. |
