PRECISION CONTINUOUS STAMP CASTING METHOD FOR ROLL-BASED SOFT LITHOGRAPHY

摘要

Method for casting a continuous cylindrical polymer stamp. The method includes depositing a first layer of a fluid polymer on the inside of a rotatable drum and rotating the drum for a selected time and at a selected angular velocity. The polymer is cured to produce a uniform datum surface. A second layer of polymer is deposited on the first layer in the drum and the drum is rotated until solvent in the polymer has evaporated thereby forming a stable layer. The polymer is selectively exposed and developed to create a desired pattern. Thereafter, a polymer precursor is deposited on the patterned second layer and the polymer precursor is allowed to cure while the drum is rotating to produce a cured stamp. The cured stamp is removed from the drum.