发明名称 TRANSPARENT SUBSTRATE WITH NANO-PATTERN AND METHOD OF MANUFACTURING THEREOF
摘要 PURPOSE: A transparent substrate having a nanopattern and a manufacturing method of the same are provided to uniformly implement a nanoscale grating pattern throughout a large area of the transparent substrate. CONSTITUTION: A resin layer made of a transparent material is formed on a transparent substrate(S1). At least more than one unit pattern part composed by a first pattern region, a second pattern region and a protruded pattern is formed on the resin layer(S3). A nanoscale metal layer is formed on the protruded pattern(S5). Multiple grating patterns are formed on the first and second pattern regions. The height of the protruded pattern is higher than the height of the grating pattern. [Reference numerals] (AA) Start; (BB) Finish; (S1) Form a transparent resin layer on a transparent substrate; (S3) Form one or more unit pattern parts composed of first and second pattern regions and a protrusion pattern on a resin layer; (S5) Form a metal layer of a nanoscale on a protrusion pattern
申请公布号 KR20130070076(A) 申请公布日期 2013.06.27
申请号 KR20110137217 申请日期 2011.12.19
申请人 LG INNOTEK CO., LTD. 发明人 LEE, JUN;YOO, KYOUNG JONG;LEE, YOUNG JAE;KIM, JIN SU
分类号 H01L21/027 主分类号 H01L21/027
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