| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a larger high quality substrate. <P>SOLUTION: A sapphire substrate comprises a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having an nTTV of about 0.037 μm/cm<SP POS="POST">2</SP>or less, where the nTTV is total thickness variation normalized for the surface area of the generally planar surface, the substrate having a diameter of about 9.0 cm or greater. <P>COPYRIGHT: (C)2013,JPO&INPIT |
