| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image acquisition device and a focus method thereof, which can detect a focal position of a sample with high accuracy by securing light quantity. <P>SOLUTION: An image acquisition device M includes an optical path difference generation member 21 provided in a second light path L2. This can reduce light quantity when a second imaging device 20 captures an optical image (front focus) having a focal point in front of an optical image entering a first imaging device 18, and an optical image (rear focus) having a focal point behind that, and can secure light quantity when the first imaging device 18 captures an image. In the image acquisition device M, a waiting time W from imaging in a first imaging region 22A to imaging in a second imaging region 22B is set on the basis of a scanning speed V of a stage and an interval d between the first imaging region 22A and the second imaging region 22B. Accordingly, light from the same position in a sample S enters the first imaging region 22A and the second imaging region 22B, allowing focus position control to be performed with high accuracy. <P>COPYRIGHT: (C)2013,JPO&INPIT |
