METHOD AND APPARATUS FOR ADJUSTING RADIATION SPOT SIZE
摘要
An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.
申请公布号
WO2013095786(A1)
申请公布日期
2013.06.27
申请号
WO2012US63102
申请日期
2012.11.01
申请人
ELECTRO SCIENTIFIC INDUSTRIES, INC;O'CONNOR, CIARAN, JOHN PATRICK;HILLIARD, SHANE;SUMMERFIELD, LEIF
发明人
O'CONNOR, CIARAN, JOHN PATRICK;HILLIARD, SHANE;SUMMERFIELD, LEIF