| 发明名称 |
FABRICATION OF SEAMLESS LARGE AREA MASTER TEMPLATES FOR IMPRINT LITHOGRAPHY |
| 摘要 |
Described are methods of forming large area templates useful for patterning large area optical devices including e.g. wire grid polarizers (WGPs). Such methods provide for seamless patterning of such large area devices. |
| 申请公布号 |
WO2013096459(A1) |
申请公布日期 |
2013.06.27 |
| 申请号 |
WO2012US70639 |
申请日期 |
2012.12.19 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
RESNICK, DOUGLAS J.;MILLER, MICHAEL N.;XU, FRANK Y. |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
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