| 摘要 |
A co-planar differential pressure sensor module (100) is provided. The module (100) includes a base (109) having a pair of recesses (217, 219). A pair of pedestals (218, 220) is also provided where each pedestal (218, 220) is disposed in a respective recess (217, 219) and is coupled to a respective isolation diaphragm (222). A differential pressure sensor (208) has a sensing diaphragm and a pair of pressure sensing ports (210, 212). Each port (210, 212) of the differential pressure sensor (208) is fluidically coupled to a respective isolation diaphragm (222) by a fill fluid. The module (100) also includes circuitry (216) coupled to the differential pressure sensor (209) to measure an electrical characteristic of the sensor (208) that varies with differential pressure. The base (109) is constructed from a material that is suitable for submersion in seawater. A method (300) of constructing a co-planar differential pressure sensor module (100) is also provided. In another embodiment, a pressure sensor module is provided. The pressure sensor module (100) includes a base having a recess. A pedestal is disposed in the recess and is coupled to an isolation diaphragm. A pressure sensor having a sensing diaphragm and a pressure sensing port is fluidically coupled to the isolation diaphragm by a fill fluid. Circuitry is coupled to the pressure sensor to measure an electrical characteristic of the sensor that varies with pressure. The base is constructed from a material that is suitable for submersion in seawater. |
