发明名称 |
HOMOGENEOUS HIPIMS COATING METHOD |
摘要 |
The invention relates to a HIPIMS method by means of which homogeneous layers can be deposited over the height of a coating chamber. Two partial cathodes are used for said purpose. According to the invention, the length of the individual power pulse intervals applied to the partial cathodes is chosen individually and thus a required coating thickness profile over the height of the coating chamber is achieved. |
申请公布号 |
CA2859747(A1) |
申请公布日期 |
2013.06.27 |
申请号 |
CA20122859747 |
申请日期 |
2012.11.23 |
申请人 |
OERLIKON TRADING AG, TRUBBACH |
发明人 |
KRASSNITZER, SIEGFRIED;RUDIGIER, HELMUT |
分类号 |
H01J37/34;C23C14/34 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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