发明名称 |
FULL WAFER PROCESSING BY MULTIPLE PASSES THROUGH A COMBINATORIAL REACTOR |
摘要 |
Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.
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申请公布号 |
US2013164906(A1) |
申请公布日期 |
2013.06.27 |
申请号 |
US201113337425 |
申请日期 |
2011.12.27 |
申请人 |
KELEKAR RAJESH;FRANCIS AARON;LIM GREGORY;INTERMOLECULAR, INC. |
发明人 |
KELEKAR RAJESH;FRANCIS AARON;LIM GREGORY |
分类号 |
H01L21/76 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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