发明名称 |
RELAXATION AND TRANSFER OF STRAINED LAYERS |
摘要 |
The present invention relates a method for the formation of at least partially relaxed strained material on a target substrate, comprising the subsequently performed steps of forming islands from a strained material layer on an intermediate substrate, at least partially relaxing the strained material islands by a first heat treatment and transferring the at least partially relaxed strained material islands to the target substrate. |
申请公布号 |
KR20130070652(A) |
申请公布日期 |
2013.06.27 |
申请号 |
KR20137012250 |
申请日期 |
2009.07.02 |
申请人 |
SOITEC |
发明人 |
LETERTRE FABRICE;FAURE BRUCE;GUENARD PASCAL;KRAMES MIKE;MCLAURIN NELSON;GARDNER NATE |
分类号 |
H01L21/20;H01L31/18;H01L33/00 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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