| 摘要 |
In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.
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