| 摘要 |
Incremental angular capacitive displacement transducer comprising movable (1) and fixed (2) dielectric plates, sections of electrode (3), jointed by means of inter-section electrical connections and situated on side of fixed (2) dielectric plate facing movable (1) dielectric plate, sections of two electrodes (4, 5) located on side of movable (1) dielectric plate facing fixed (2) dielectric plate, and signal conversion unit (6). Movable (1) and fixed (2) plates are executed in the form of discs. The indicated transducer is additionally provided with six (7, 8, 9, 10, 11, 12) oscillating circuits with inductance coils (13, 14, 15, 16, 17, 18), galvanically isolated from signal conversion unit (6), and sections of six (3, 19, 20, 21, 22, 23) electrodes of three (7, 8, 9) oscillating circuits situated by circumference on side of fixed (2) disc facing movable (1) disc, sections of six (24, 25, 26, 27, 28, 29) electrodes of three (10, 11, 12) oscillating circuits on smaller diameter circumference on side of fixed (2) disc facing movable (1) disc, sections of common electrode (4) of three (7, 8, 9) oscillating circuits located by circumference on side of movable (1) disc facing fixed (2) disc above sections of six (3, 19, 20, 21, 22, 23) electrodes of three (7, 8, 9) oscillating circuits, sections of common electrode (5) of three (10, 11, 12) oscillating circuits situated by smaller diameter circumference on side of movable (1) disc facing fixed (2) disc above sections of six (24, 25, 26, 27, 28, 29) electrodes of three (10, 11, 12) oscillating circuits, and signal conversion unit (6) comprises six inductance coils (30, 31, 32, 33, 34, 35) for injecting energy into six (7, 8, 9, 10, 11, 12) oscillating circuits and six inductance coils (36, 37, 38, 39, 40, 41) for reading the resonant oscillation frequency of six (7, 8, 9, 10, 11, 12) oscillating circuits. Six inductance coils (13, 14, 15, 16, 17, 18) of six (7, 8, 9, 10, 11, 12) oscillating circuits, six inductance coils (30, 31, 32, 33, 34, 35) for injecting energy into six (7, 8, 9, 10, 11, 12) oscillating circuits and six inductance coils (36, 37, 38, 39, 40, 41) for reading the resonant oscillation frequency of six (7, 8, 9, 10, 11, 12) oscillating circuits of signal conversion unit (6) are produced in the form of flat spirals and situated on external side (42) of fixed (2) disc. The proposed incremental capacitance angular displacement transducer will find wide application in automation devices of angular displacement measuring. |
