Solid-mount bulk acoustic wave resonator (SMR) used in wireless communication device, has active area of acoustic reflector that is formed by overlapping of acoustic reflector, electrodes and piezoelectric layer

摘要

The resonator (100) has a piezoelectric layer (103) that is located between the electrodes (102,104). An acoustic reflector (105) comprises several layers and locates beneath the electrodes and the piezoelectric layer. Active area of acoustic reflector (114) is formed by overlapping of acoustic resonator, electrodes and piezoelectric layer. The piezoelectric layer is extended over edge of the electrode (102). A bridge (108) is provided as adjacent to termination of active area of the acoustic resonator. The bridge is overlapped with portion of electrode (102).