| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a configuration that can more accurately adjust a position to which a laser beam is applied even if the strength of the laser beam to be applied to a workpiece 11 varies. <P>SOLUTION: A laser beam whose light path is changed by a light modulation device 7 for changing the polarization direction of a penetrating light and a first polarizer 6 is reflected according to the polarization of a laser beam by a second polarizer 61, and is incident into a position sensor 81. This allows the strength of the laser beam incident into the position sensor 81 to be within a strength range set by the position sensor even when the strength of the laser beam varies. In addition, the position sensor 81 can be placed at a position closer to the workpiece 11, thereby limiting the influence of air shimmering, or the like, to the minimum. As a result, a position to which the laser beam is applied is more accurately adjusted. <P>COPYRIGHT: (C)2013,JPO&INPIT |
