ALUMINUM NITRIDE SINGLE CRYSTAL SUBSTRATE AND METHOD FOR PRODUCING SAME
摘要
The present invention relates to an aluminum nitride single crystal characterized in that the concentration of carbon is 1×1014 atoms/cm3 or more and less than 3×1017 atoms/cm3, the concentration of chlorine is 1×1014 to 1×1017 atoms/cm3, and the absorption coefficient at a wavelength of 265 nm is 40 cm-1 or less.
申请公布号
WO2013094058(A1)
申请公布日期
2013.06.27
申请号
WO2011JP79838
申请日期
2011.12.22
申请人
NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY;TOKUYAMA CORPORATION;KOUKITU, AKINORI;KUMAGAI, YOSHINAO;NAGASHIMA, TORU;KUBOTA, YUKI
