| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric material consisting of a non-lead perovskite oxynitride having a piezoelectric constant as large as that of BaTiO<SB POS="POST">3</SB>or larger. <P>SOLUTION: The piezoelectric material comprises a perovskite oxynitride expressed by the general formula (1). In the formula (1), x, y, z and w are numerical values satisfying 0≤x≤1, 0≤y≤1, 0<z<1/3 and 0<w≤z, respectively; z preferably falls in a range of 0.1≤z≤0.2. Further, the piezoelectric material is composed of a film having a thickness between 200 nm and 10 μm inclusive; the perovskite oxynitride has a tetragonal structure preferably. The absolute values of Δd33 and Δd31 each represented by a difference between the piezoelectric constant of tetragonal crystal corresponding to the general formula (x=0 and 0.15; y=0; 0<z<1/3) and the piezoelectric constant of BaTiO3 exhibit local maxima respectively when z is about 0.125. <P>COPYRIGHT: (C)2013,JPO&INPIT |
