GANGED SCANNING OF MULTIPLE MAGNETRONS, ESPECIALLY TWO LEVEL FOLDED MAGNETRONS

摘要

PROBLEM TO BE SOLVED: To provide a magnetron assembly that includes one or more magnetrons (112) each forming a closed plasma loop on the sputtering face of a target (124).

SOLUTION: The target may include multiple strip targets on which respective strip magnetrons roll (126) and are partially supported on a common support plate (32) through a spring mechanism (114). The strip magnetron may be a two-level folded magnetron (200) in which each magnetron forms a folded plasma loop extending between lateral sides of the strip target and its ends meet (220) in the middle of the target. The magnets forming the magnetron may be arranged in a pattern having generally uniform straight portions joined by curved portion in which extra magnet positions are available near the corners to steer the plasma track.

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