| 发明名称 |
REPAIR METHOD OF SUBSTRATE SURFACE SCRATCH |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for locally repairing a fine scratch on a substrate surface. <P>SOLUTION: The repair method of a substrate surface scratch comprises processes of: providing a peripheral part of a scratch with a precursor; and locally repairing a fine scratch on a substrate surface by irradiating an ultraviolet laser beam at the scratch part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2013128074(A) |
申请公布日期 |
2013.06.27 |
| 申请号 |
JP20110277594 |
申请日期 |
2011.12.19 |
| 申请人 |
TOSOH CORP |
发明人 |
HIRAI AKISATO;HARADA YOSHINORI;ARAI KAZUYOSHI |
| 分类号 |
H01L21/316;C23C16/48;C23C16/56;H01L21/312 |
主分类号 |
H01L21/316 |
| 代理机构 |
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| 主权项 |
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