发明名称 TRANSISTOR STRUCTURE AND METHOD FOR PREPARING THE SAME
摘要 A transistor structure includes a semiconductor substrate; a conductor having a lower block in the semiconductor substrate and an upper block on the semiconductor substrate; a metal layer positioned on the upper block; a cap layer positioned on the metal layer; an upper insulation layer positioned at least on sidewalls of the metal layer and the cap layer; and a lower insulation layer positioned on sidewalls of the upper block of the conductor.
申请公布号 US2013161735(A1) 申请公布日期 2013.06.27
申请号 US201113336814 申请日期 2011.12.23
申请人 PANDA DURGA;NANYA TECHNOLOGY CORPORATION 发明人 PANDA DURGA
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
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