发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are disclosed, which can improve device characteristics by increasing a process margin between an active region and a storage node contact. The semiconductor device includes an active region, a device isolation film formed to have a lower height than the active region, and exposing an upper part of the active region, and a barrier pattern formed at a sidewall of the exposed active region of an upper part of the device isolation film.
申请公布号 US2013161781(A1) 申请公布日期 2013.06.27
申请号 US201213474568 申请日期 2012.05.17
申请人 LEE SEONG EUN;SK HYNIX INC. 发明人 LEE SEONG EUN
分类号 H01L27/04 主分类号 H01L27/04
代理机构 代理人
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