发明名称 FULLY ENCAPSULATED CONDUCTIVE LINES
摘要 <p>Fully encapsulated conductive lines are generally described. For example, a first dielectric layer is formed on a substrate. Copper wiring is disposed below a top surface of the first dielectric layer. A barrier metal layer is formed over the copper wiring, the barrier metal layer flush with the top surface of the first dielectric layer, and a second dielectric layer is formed on the barrier metal layer and the top surface of the first dielectric layer. Other embodiments are also disclosed and claimed.</p>
申请公布号 WO2013095438(A1) 申请公布日期 2013.06.27
申请号 WO2011US66495 申请日期 2011.12.21
申请人 INTEL CORPORATION;LINDERT, NICK;SINGH, KANWAL JIT;LEE, BYUNG-CHAN 发明人 LINDERT, NICK;SINGH, KANWAL JIT;LEE, BYUNG-CHAN
分类号 H01L21/28;H01L21/31 主分类号 H01L21/28
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