| 摘要 |
PURPOSE: An electrostatic chuck and a method for manufacturing the same are provided to improve chucking performance by using an electrode pattern for attaching a chuck body. CONSTITUTION: A glass bonding module(20) includes a first glass and a second glass. An electrode pattern(23) is formed in the one surface of the first glass or the second glass. An edge cover is installed in the circumference of the glass bonding module. The glass bonding module is fixed to a chuck body(30). The glass bonding module and the chuck body are interconnected.
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