| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heating treatment method capable of efficiently sintering fine particles at low temperature while preventing thermal deformation and damage caused by heat and a device for the method. <P>SOLUTION: PET(polyethylene terephthalate) to which silver fine particles are applied is sent into a chamber and stored as an object to be treated (workpiece). In Step S2, the workpiece is stored inside the chamber and heating treatment is applied to the workpiece. Separately from the heating treatment in Step S2, vacuum treatment for treating the workpiece in a vacuum inside the chamber with the workpiece stored is performed in parallel with the heating treatment in Step S2. Combination of the vacuum treatment with the heating treatment reduces heating time so as to reduce a temperature. Thus, while thermal deformation and damage caused by heat are prevented, the fine particles can be efficiently sintered at low temperature. <P>COPYRIGHT: (C)2013,JPO&INPIT |
